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multilayer thin films for pyroelectric infrared sensor application
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10.1063/1.2196234
/content/aip/journal/jap/99/9/10.1063/1.2196234
http://aip.metastore.ingenta.com/content/aip/journal/jap/99/9/10.1063/1.2196234

Figures

Image of FIG. 1.
FIG. 1.

Flow chart of PZT precursor preparation process.

Image of FIG. 2.
FIG. 2.

TGA (a) and DTA (b) analysis of the PZT precursor at a heating rate of in air.

Image of FIG. 3.
FIG. 3.

Schematic structures of multilayer PZT/PT thin films.

Image of FIG. 4.
FIG. 4.

XRD patterns of the multilayer PZT/PT thin films.

Image of FIG. 5.
FIG. 5.

The cross-section TEM image of the multilayer 5PZT/4PT thin film (a) dark field image, (b) bright field image of the same area with (a), and (c) enlarge bright field image.

Image of FIG. 6.
FIG. 6.

HRTEM images on PT-on-PZT interface regions of the multilayer thin film (a) and (b).

Image of FIG. 7.
FIG. 7.

SIMS composition depth profile of 5PZT/4PT multilayer thin film.

Image of FIG. 8.
FIG. 8.

Dielectric properties of the films as a function of PT volume fraction (, ).

Image of FIG. 9.
FIG. 9.

Dielectric constants as a function of frequency (1 Hz–100 kHz).

Image of FIG. 10.
FIG. 10.

Dielectric loss tangents as a function of frequency (1 Hz–100 kHz).

Image of FIG. 11.
FIG. 11.

Schematic diagram of space charge accumulation at the interface region.

Image of FIG. 12.
FIG. 12.

Hysteresis loops of (a) 5PZT/4PT multilayer thin film and (b) pure PZT.

Image of FIG. 13.
FIG. 13.

Charged defects intersecting at domain wall.

Image of FIG. 14.
FIG. 14.

Hysteresis loops before and after ac-field cycling.

Image of FIG. 15.
FIG. 15.

Corresponding pyroelectric currents with a temperature (a) increasing rate and (b) decreasing rate of .

Tables

Generic image for table
Table I.

Stacking structures of the multilayer thin films. (total thickness of PT layers in the film) and (total thickness of PZT layers in the film).

Generic image for table
Table II.

Properties comparison of multilayer 5PZT/4PT and pure PZT films.

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/content/aip/journal/jap/99/9/10.1063/1.2196234
2006-05-15
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Pb(Zr0.3Ti0.7)O3∕PbTiO3 multilayer thin films for pyroelectric infrared sensor application
http://aip.metastore.ingenta.com/content/aip/journal/jap/99/9/10.1063/1.2196234
10.1063/1.2196234
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