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Grazing incident small angle x-ray scattering study of polymer thin films with embedded ordered nanometer cells
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10.1063/1.2749724
/content/aip/journal/jcp/127/1/10.1063/1.2749724
http://aip.metastore.ingenta.com/content/aip/journal/jcp/127/1/10.1063/1.2749724

Figures

Image of FIG. 1.
FIG. 1.

Nanocellular formation using block copolymer template and process. -philic block domains (shown as black) are swollen (dark gray) with under pressure. Temperature is quenched to to freeze the non--philic block domains (light gray). After depressurization, the empty cells (white) are introduced into the -philic block domains.

Image of FIG. 2.
FIG. 2.

Schematic picture of GISAXS geometry. is defined as the directions of x ray. and are horizontal and vertical directions.

Image of FIG. 3.
FIG. 3.

A model for distorted wave Born approximation. Uniform cells of radius are packed in a hexagonal lattice as in panel a with paracrystal distortion in panel b. The axes are defined the same way as in Fig. 2.

Image of FIG. 4.
FIG. 4.

Examples of GISAXS patterns from PS-PFMA block copolymer thin films on silicon substrate after thermal annealing (a) and after the process (b). Incident angle of 0.15° was chosen. Intensity increases from blue to red in logarithmic scale.

Image of FIG. 5.
FIG. 5.

Intensity vs of the nanocellular thin film at the critical of the nanocellular film. The thin arrows are 1, , , and relative to the first order. The thick arrow is the first fringe of the form factor.

Image of FIG. 6.
FIG. 6.

Intensity vs of the nanocellular thin film at the peak .

Image of FIG. 7.
FIG. 7.

Calculated and measured two dimensional intensity images at incident angles of 0.150° and 0.225°.

Image of FIG. 8.
FIG. 8.

Calculated intensities using DWBA of the slices at the , with a maximum intensity, at incident angles of 0.150° (above) and 0.225° (below). Full calculation of DWBA (solid) and its components: and are transmitted and reflected components, respectively. For instance, indicates that the incident x ray was reflected, scattered, and transmitted through the sample and reached the detector.

Tables

Generic image for table
Table I.

Characterization of PS-PFMA and PS.

Generic image for table
Table II.

Model parameters for DWBA calculation.

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/content/aip/journal/jcp/127/1/10.1063/1.2749724
2007-07-06
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Grazing incident small angle x-ray scattering study of polymer thin films with embedded ordered nanometer cells
http://aip.metastore.ingenta.com/content/aip/journal/jcp/127/1/10.1063/1.2749724
10.1063/1.2749724
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