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Dissolution dynamics of thin films measured by optical reflectance
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) Calculated reflection , transmission , and absorption coefficient of a copper thin film illuminated with monochromatic light with a wavelength of as a function of film thickness. (b) Possible measurement configurations. The thickness of a thin film on glass could be either determined in transmission or reflection since with increasing metal film thickness the transmissivity decreases while the reflectivity increases. (c) Calibration setup for measurement of copper islands in reflection. (d) Bright field microscopic images of copper disks on a gold substrate (thickness as indicated). (e) Color of copper islands in a recorded image such as shown in (d). The color is represented by the normalized average values of the three color channels red (circles), green (squares), and blue (triangles). [(f) and (g)] Average color signal (see text) as a function of plating time (e) and measured film thickness (f).

Image of FIG. 2.
FIG. 2.

In situ dissolution analysis. (a) Experimental setup. (b) Snapshots of a copper island dissolving in pH 3 hydrochloric acid at indicated times after initiation of the experiment. The small circular feature at the bottom right is an air bubble which became trapped inside the system. (c) Height profiles for indicated times corresponding to the measurement shown in (b). (c) Calculated dissolution rate (see text).

Image of FIG. 3.
FIG. 3.

Geometry-dependent dissolution behavior. [(a) and (b)] Dissolution rates for copper lines of different width (cross sections). [(c)–(e)] Two-dimensional map of the dissolution rate at the corner of a Cu electrode at indicated time moments. The dissolution rate is at a maximum at the corner of the Cu structure. Insets show the corresponding optical bright field images of the copper electrode on a smaller scale.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dissolution dynamics of thin films measured by optical reflectance