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A fully alignment-resolved O sticking experiment on a single domain Si(100)-(2×1) surface is presented. This provides the first experimental evidence that the reactivity of O depends on both the polar and azimuthal angles of the molecular axis relative to a surface. It has been found that, in case of side-on collision, an O molecule to the dimer on Si(100) is about 40% more reactive than that parallel to the dimer. Comparison of the O sticking on flat and vicinal Si(100) surfaces indicates that barrierless dissociation channels exist at the double layer step.


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