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Laser studies of the reactivity of SiH with the surface of a depositing film
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10.1063/1.456971
/content/aip/journal/jcp/91/4/10.1063/1.456971
http://aip.metastore.ingenta.com/content/aip/journal/jcp/91/4/10.1063/1.456971
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/content/aip/journal/jcp/91/4/10.1063/1.456971
1989-08-15
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Laser studies of the reactivity of SiH with the surface of a depositing film
http://aip.metastore.ingenta.com/content/aip/journal/jcp/91/4/10.1063/1.456971
10.1063/1.456971
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