Index of content:
Volume 25, Issue 5, September 1996
25(1996); http://dx.doi.org/10.1063/1.555994View Description Hide Description
The thermodynamic and spectroscopicproperties of the iodine oxide species have been reviewed. Recommended NIST–JANAF Thermochemical Tables are given for six gaseous iodine oxides: IO, OIO, IOO, IOI, IIO, and IO3. Sufficient information is not available to generate thermochemical tables for any condensed phase species. Annotated bibliographies (over 400 references) are provided for all neutral iodine oxides which have been reported in the literature. There is a lack of experimental thermodynamic and spectroscopic information for all iodine oxide species, except IO(g) and OIO(g). The recommended thermochemical tables are based on estimates for the structure, vibrational frequencies, and enthalpy of formation based in part on the spectroscopic and thermodynamic data for the other halogen oxides [J. Phys. Chem. Ref. Data 25, 551 (1996); 25, 1061 (1996)]. Although there is a definite lack of information in comparison with the other halides, this information is provided for the iodine oxides for the following reasons: (1) to complete the study of the halogen oxide family and (2) to stress the need for additional experimental measurements. Of all the species mentioned in the literature, many have not been isolated or characterized. In fact, some do not exist. Throughout this paper, uncertainties attached to recommended values correspond to the uncertainty interval, equal to twice the standard deviation of the mean.
25(1996); http://dx.doi.org/10.1063/1.555986View Description Hide Description
Carbon tetrafluoride (CF4) is one of the most widely used components of feed gas mixtures employed for a variety of plasma‐assisted material‐processing applications. It has no stable excited states and, in a plasma environment, is an ideal source of reactive species, especially F atoms. To assess the behavior of CF4 in its use in manufacturingsemiconductor devices and other applications, it is necessary to have accurate information about its fundamental properties and reactions, particularly its electronic and ionic interactions and its electron collision processes at low energies (<100 eV). In this article we assess and synthesize the available information on the cross sections and/or the rate coefficients for collisional interactions of CF4 with electrons. Assessed information is presented on: (i) cross sections for electron scattering (total, momentum, elastic differential, elastic integral, inelastic), electron‐impact ionization (total, partial, multiple, dissociative), electron‐impact dissociation (total, and for dissociative excitation), and electron attachment (total, and for specific anions); (ii) coefficients for electron transport (electron drift velocity, transverse and longitudinal electron diffusion coefficients), electron attachment, and electron‐impact ionization; and (iii) cross section sets derived from analyses of electron transport data. The limited ionization data on CF4 radicals are also presented, and references are made to measurements of electron transport properties of CF4 gas mixtures. Based upon the assessment of published experimental data, recommended values for various cross sections and coefficients are generated which are presented in graphical and tabular form.