Abstract

We have developed an innovative way to fabricate organic solar arrays for application in dc power supplies for electrostatic microelectromechanical systemsdevices. A solar array with 20 miniature cells interconnected in series was fabricated and characterized. Photolithography was used to isolate the individual cells and output contacts of the array, whereas the thermal-vacuum deposition is employed to make the series connections of the array. With for single cell and a total device area of , the organic solar array based on bulk heterojunction structure of -conjugated polymers and derivative [6,6]-phenyl butyric acid methyl ester produced an open-circuit voltage of and a short-circuit current of under simulated air mass (AM) 1.5 illumination with an intensity of . The procedure described here has the full potential for use in future fabrication of microarray with the size as small as .