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Effect of axial finiteness on electron heating in low-frequency inductively coupled plasmas
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10.1063/1.2359281
/content/aip/journal/pop/13/10/10.1063/1.2359281
http://aip.metastore.ingenta.com/content/aip/journal/pop/13/10/10.1063/1.2359281
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Skin depth vs frequency using semi-infinite and the finite-length plasma models at pressures of 0.3 and .

Image of FIG. 2.
FIG. 2.

The ratio of the total to the collisional absorbed power calculated with three different models at a pressure of with the following plasma parameters: , , , and .

Image of FIG. 3.
FIG. 3.

The ratio of the total to the collisional absorbed power calculated with three different models at a pressure of with the following plasma parameters: , , , and .

Image of FIG. 4.
FIG. 4.

Nonlocality parameter vs frequency (MHz) at pressures of 0.3 and .

Image of FIG. 5.
FIG. 5.

Spatial profiles of the total and purely collisional absorbed power normalized to collisional absorbed power at the boundary plotted using the semi-infinite plasma at a pressure of and a frequency of .

Image of FIG. 6.
FIG. 6.

Spatial profiles of the total and purely collisional absorbed power normalized to collisional absorbed power at the boundary plotted using the finite-length plasma model at a pressure of , a frequency of , and .

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/content/aip/journal/pop/13/10/10.1063/1.2359281
2006-10-05
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of axial finiteness on electron heating in low-frequency inductively coupled plasmas
http://aip.metastore.ingenta.com/content/aip/journal/pop/13/10/10.1063/1.2359281
10.1063/1.2359281
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