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A self-consistent hybrid model of a dual frequency sheath: Ion energy and angular distributions
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10.1063/1.2434250
/content/aip/journal/pop/14/1/10.1063/1.2434250
http://aip.metastore.ingenta.com/content/aip/journal/pop/14/1/10.1063/1.2434250
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of the dual rf sheath model. The low frequency source (LF) and the high frequency source (HF) are applied to the electrode.

Image of FIG. 2.
FIG. 2.

The time dependence of (a) the sheath potential, (b) the sheath thickness, and (c) the ion flux impinging on the dual rf powered electrode for different values of the frequency of the low-frequency source, the power of the low- and high-frequency sources are, respectively, fixed at and , the high-frequency at , the gas pressure at .

Image of FIG. 3.
FIG. 3.

The effects of the pressure on (a) the sheath potential, (b) the sheath thickness, and (c) the ion flux. The frequency and power of the low- and high-frequency sources are, respectively, fixed at , , , and .

Image of FIG. 4.
FIG. 4.

The effects of the power of the low-frequency source on (a) the sheath potential, (b) the sheath thickness, and (c) the ion flux. The lower and higher frequency are, respectively, fixed at , , the power of the high-frequency source at , the gas pressure at .

Image of FIG. 5.
FIG. 5.

(a) The sheath potential, (b) the sheath thickness, and (c) the ion flux with the voltage driven method. The input parameters are the same as those in Fig. 3.

Image of FIG. 6.
FIG. 6.

The low frequency dependence of the IEDs, the gas pressure is fixed at , the high frequency at , the power of the low- and high-frequency sources are, respectively, fixed at and .

Image of FIG. 7.
FIG. 7.

The collisional effects on the IEDs. The lower and higher frequency are, respectively, fixed at , , the power of the low- and high-frequency sources are, respectively, fixed at and .

Image of FIG. 8.
FIG. 8.

The effects of the low-frequency source power on the IEDs with the lower and higher frequency, respectively, kept at , , the high-frequency source power at , the gas pressure at .

Image of FIG. 9.
FIG. 9.

The pressure dependence of the IADs. The input parameters are the same as in Fig. 7.

Image of FIG. 10.
FIG. 10.

The pressure dependence of the IEDs from the voltage driven method. The input parameters are the same as in Fig. 5.

Image of FIG. 11.
FIG. 11.

The pressure dependence of the IADs from the voltage driven method. The input parameters are the same as in Fig. 5.

Image of FIG. 12.
FIG. 12.

The effects of discharge pressure on the IEDs with the voltage-driven method where the amplitudes of voltages of the higher frequency source and the lower frequency source are fixed at and , respectively.

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/content/aip/journal/pop/14/1/10.1063/1.2434250
2007-01-31
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A self-consistent hybrid model of a dual frequency sheath: Ion energy and angular distributions
http://aip.metastore.ingenta.com/content/aip/journal/pop/14/1/10.1063/1.2434250
10.1063/1.2434250
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