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Comparison of measurements and particle-in-cell simulations of ion energy distribution functions in a capacitively coupled radio-frequency discharge
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10.1063/1.2795634
/content/aip/journal/pop/14/10/10.1063/1.2795634
http://aip.metastore.ingenta.com/content/aip/journal/pop/14/10/10.1063/1.2795634
/content/aip/journal/pop/14/10/10.1063/1.2795634
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/content/aip/journal/pop/14/10/10.1063/1.2795634
2007-10-31
2014-09-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Comparison of measurements and particle-in-cell simulations of ion energy distribution functions in a capacitively coupled radio-frequency discharge
http://aip.metastore.ingenta.com/content/aip/journal/pop/14/10/10.1063/1.2795634
10.1063/1.2795634
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