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Growth mechanism for spherical carbon particles in a dc methane plasma
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10.1063/1.2917912
/content/aip/journal/pop/15/5/10.1063/1.2917912
http://aip.metastore.ingenta.com/content/aip/journal/pop/15/5/10.1063/1.2917912
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

SEM micrograph of the substrate surface, showing spherical carbon particles grown by a self-organization process, maintained at during the plasma irradiation time of (Ref. 1).

Image of FIG. 2.
FIG. 2.

Schematic structure of the electric potential in the plasma sheath region (Ref. 11). The -axis points vertically upward. The -axis denotes the electric potential. The notations and are the positions of the sheath and plasma edges, respectively, and and are the electric potentials at each edge. The ranges , and are for the sheath, presheath, and plasma, respectively.

Image of FIG. 3.
FIG. 3.

Time dependence of the particle radius. and are the saturation radius and characteristic time, respectively. The solid line represents the theoretical curve of Eq. (4). Open circles, open squares, and solid circles are the experimental results at substrate temperatures of , , and , respectively, under the same gas volume ratio (Ref. 1).

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/content/aip/journal/pop/15/5/10.1063/1.2917912
2008-05-23
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Growth mechanism for spherical carbon particles in a dc methane plasma
http://aip.metastore.ingenta.com/content/aip/journal/pop/15/5/10.1063/1.2917912
10.1063/1.2917912
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