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Analysis of optical emission spectroscopy in a dual-frequency capacitively coupled plasma
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10.1063/1.3122937
/content/aip/journal/pop/16/4/10.1063/1.3122937
http://aip.metastore.ingenta.com/content/aip/journal/pop/16/4/10.1063/1.3122937
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Measured optical emission spectrum for a 2.5 Pa admixed with (a) 5% Ar, (b) 5% discharge sustained with 41 MHz 150 W and 2 MHz 30 W together.

Image of FIG. 2.
FIG. 2.

(a) The relative densities of F (703.8 nm) and H (434.1 nm) and (b) the line ratio of as functions of LF power. HF power and the gas pressure are fixed at 150 W and 2.5 Pa, respectively.

Image of FIG. 3.
FIG. 3.

(a) The relative densities of F (703.8 nm) and H (434.1 nm) and (b) the line ratio of as functions of HF power. LF power and the gas pressure are fixed at 30 W and 2.5 Pa, respectively.

Image of FIG. 4.
FIG. 4.

(a) The relative densities of F (703.8 nm) and H (434.1 nm) and (b) the line ratio of as functions of gas pressure. HF and LF power are fixed at 150 and 30 W, respectively.

Image of FIG. 5.
FIG. 5.

The excitation temperature of H as functions of (a) LF power (HF power and gas pressure are fixed at 150 W and 2.5 Pa), (b) HF power (LF power and gas pressure are fixed at 30 W and 2.5 Pa), and (c) gas pressure (HF and LF power are fixed at 150 and 30 W).

Image of FIG. 6.
FIG. 6.

The rotational temperature of as functions of (a) LF power (HF power and gas pressure are fixed at 150 W and 2.5 Pa), (b) HF power (LF power and gas pressure are fixed at 30 W and 2.5 Pa), and (c) gas pressure (HF and LF power are fixed at 150 and 30 W).

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/content/aip/journal/pop/16/4/10.1063/1.3122937
2009-04-28
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Analysis of optical emission spectroscopy in a dual-frequency capacitively coupled CHF3 plasma
http://aip.metastore.ingenta.com/content/aip/journal/pop/16/4/10.1063/1.3122937
10.1063/1.3122937
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