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Analysis of optical emission spectroscopy in a dual-frequency capacitively coupled plasma
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10.1063/1.3122937
/content/aip/journal/pop/16/4/10.1063/1.3122937
http://aip.metastore.ingenta.com/content/aip/journal/pop/16/4/10.1063/1.3122937
/content/aip/journal/pop/16/4/10.1063/1.3122937
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/content/aip/journal/pop/16/4/10.1063/1.3122937
2009-04-28
2014-12-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Analysis of optical emission spectroscopy in a dual-frequency capacitively coupled CHF3 plasma
http://aip.metastore.ingenta.com/content/aip/journal/pop/16/4/10.1063/1.3122937
10.1063/1.3122937
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