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Measurement of plasma-surface energy fluxes in an argon rf-discharge by means of calorimetric probes and fluorescent microparticles
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View: Figures


Image of FIG. 1.
FIG. 1.

Scheme of PULVA-INP and the experimental setup: RF is the driven electrode and AE is the adaptive electrode. For the Langmuir and calorimetric probe measurements: LPS is the Langmuir probe system and CPS is the calorimetric probe system. For the particle temperature measurements: OMA is the optical multichannel analyzer, FOS is the fiber-optical system, FW is the filter wheel, and HG is the mercury arc lamp.

Image of FIG. 2.
FIG. 2.

Temporal evolution of the substrate temperature in response to a plasma pulse with approximately 55 s duration. The heating and cooling of the substrate can be described by an exponential law.

Image of FIG. 3.
FIG. 3.

Melamine-formaldehyde particles of approximately in diameter, confined in front of the adaptive electrode by setting a negative bias voltage to certain pixels. The pixel bias can be changed individually during the experiment, allowing for the manipulation of the particles in real-time.

Image of FIG. 4.
FIG. 4.

Electron temperature and floating potential as a function of discharge power , as measured by the Langmuir probe for an argon pressure of . Additionally, modeled values for the floating potential, calculated by (see text) for a planar probe in the plasma and a spherical probe in the rf sheath (using as explained in Sec. III A) are shown.

Image of FIG. 5.
FIG. 5.

Electron density as a function of discharge power at different equidistant positions above the adaptive electrode and an argon pressure of .

Image of FIG. 6.
FIG. 6.

Energy influx density in 10 Pa argon, 27 mm in front of the AE. Points show the values measured by the calorimetric probe. Modeled values are obtained on the basis of the model of Swinkels (triangles, tip up) and plasma parameters, measured by a Langmuir probe at the position of the calorimetric probe. The third curve (triangles, tip down) shows the corresponding results of the extended model (see Sec. V).

Image of FIG. 7.
FIG. 7.

Particle temperatures and the temperature of the nearby adaptive electrode in a 10 Pa argon discharge.

Image of FIG. 8.
FIG. 8.

Current-voltage characteristics from the calorimetric probe at two different discharge powers. The negative probe current is displayed as a function of the probe bias (relative to mass). The curves show a behavior which is typical for cylindrical probes.

Image of FIG. 9.
FIG. 9.

Modeled energy influx and outflux densities and from the measured particle temperatures, based on Langmuir probe measurements at a position of 15.5 mm above the AE. For , values from the model of Swinkels and the extended model are compared.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Measurement of plasma-surface energy fluxes in an argon rf-discharge by means of calorimetric probes and fluorescent microparticles