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Experimental investigation of edge-to-center density ratio in inductively coupled plasmas
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10.1063/1.3456517
/content/aip/journal/pop/17/7/10.1063/1.3456517
http://aip.metastore.ingenta.com/content/aip/journal/pop/17/7/10.1063/1.3456517
/content/aip/journal/pop/17/7/10.1063/1.3456517
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/content/aip/journal/pop/17/7/10.1063/1.3456517
2010-07-15
2014-11-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Experimental investigation of edge-to-center density ratio in inductively coupled plasmas
http://aip.metastore.ingenta.com/content/aip/journal/pop/17/7/10.1063/1.3456517
10.1063/1.3456517
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