(Color online) Comparison of the current–voltage curve predicted by the plasma model and experimental data from the literature.19
(Color online) Spatial distribution of positive ions (I), electron (II), negative ions (III), and net charge (IV) densities, at (a) t = 0, (b) t = 0.25τrf, (c) t = 0.50τrf, and (d) t = 0.75τrf, where τrf is the rf period (∼74 ns).
(Color online) Time-averaged spatial distributions of (a) charged species and (b) neutral species.
(Color online) The main (a) generation processes and (b) destruction processes of ground state atomic oxygen O. : collisional relaxation of O(1D) (R42-R44, R58); : electron impact dissociative excitation (R7-R8); : reaction between O2(b) and O3 (R52-R53); : electron impact dissociation (R6); : other generation processes; : recombination of ground state O via three-body reaction (R55); : three-body reaction for O3 formation (R57); : other destruction processes.
(Color online) Spatial profile of the time-averaged power density dissipated by charged species.
(Color online) Comparison of the normalized ground state O density profile in the radial direction obtained with (: Eq. (16)) and without (: Eq. (13)) volume loss.
(Color online) Time-averaged (a) densities and (b) electrode loss rate of ROS at plasma-electrode interface as a function of electrode absorption probability. : O; : O(1d); :O (1s); : O2(a); : O2(b); : O2(v); : O3.
Transport coefficients (T in K).
Chemical reactions included in the models.
Article metrics loading...
Full text loading...