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Understanding helicon plasmas
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10.1063/1.4739779
/content/aip/journal/pop/19/7/10.1063/1.4739779
http://aip.metastore.ingenta.com/content/aip/journal/pop/19/7/10.1063/1.4739779

Figures

Image of FIG. 1.
FIG. 1.

Radial profiles of normalized Im (– E · D * ) for the higher–γ 1 mode at 50 Gauss with varying ν/ω from 0 to 1.1 illustrating the transition from collisionless to collisional absorption with increasingν. For the plasma parameters, refer Table I. [Reprinted with permission from A. Ganguli et al. Phys. Plasmas 14, 113503 (2007). Copyright © 2007 American Institute of Physics.]

Image of FIG. 2.
FIG. 2.

(a) A typical LP characteristic for helicon discharges at 0.2 mTorr pressure of argon gas, 945 watts of RF power, and 20 Gauss magnetic field; (b) Plot of ln (I e) versus V for the plot in (a) after subtracting the ion saturation current. Figure shows the two linear regions corresponding to two electron populations with temperatures T w = 38.2 eV and T e = 2.7 eV. The other plasma parameters are n e = 1.2 × 1010 cm−3, n w = 6.7 × 107 cm−3, V f = 40.2 V, and V p = 64.4 V.

Image of FIG. 3.
FIG. 3.

Similar plots obtained for the discharge at ≈10 mTorr pressure, RF power ≈ 940 Watts, and B 0 ≈ 65 G (plateau region). (Ref. 76). For the plasma parameters, see Fig. 9.

Image of FIG. 4.
FIG. 4.

A complete block diagram showing the wavelength measurement scheme; using the vector voltmeter used for experiments.

Image of FIG. 5.
FIG. 5.

Schematic diagram of the experimental system showing the location of the loop antennas and chamber ports in relation to the axial magnetic field (B 0) profiles at various coil currents [A. Ganguli et al., "Investigation of absorption mechanisms in helicon discharges in conducting waveguides," Plasma Sources Sci. Technol. 20(1), 015021 (2011). Copyright © 2011 IOP Publishing Ltd.].

Image of FIG. 6.
FIG. 6.

Axial profile of the plasma density (n 0), bulk electron temperature (T e), warm electron density (n w), warm electron temperature (T w) and plasma potential (Vp) at ≈ 0.2 mTorr of argon, RF power ≈ 945 W, and average magnetic field B 0 ≈ 20 G (plateau region) [A. Ganguli et al., "Investigation of absorption mechanisms in helicon discharges in conducting waveguides," Plasma Sources Sci. Technol. 20(1), 015021 (2011). Copyright © 2011 IOP Publishing Ltd.].

Image of FIG. 7.
FIG. 7.

Figure showing the axial variation of phase and amplitude using the B-dot probe measurements (Ref. 76) in helicon discharge at pressure ≈0.3 mTorr, RF power ≈ 940 Watts, and B 0 ≈ 17 G. The plasma parameters for the discharge correspond approximately to those given by data in Fig. 6 [A. Ganguli et al., "Investigation of absorption mechanisms in helicon discharges in conducting waveguides," Plasma Sources Sci. Technol. 20(1), 015021 (2011). Copyright © 2011 IOP Publishing Ltd.].

Image of FIG. 8.
FIG. 8.

RF power variation studies at ≈0.2 mTorr and average magnetic field B 0 ≈ 65 G in the plateau region (Fig. 5).

Image of FIG. 9.
FIG. 9.

Typical axial profiles for n 0, T e, n w, T w, and V p at ≈10 mTorr pressure, RF power ≈ 940 Watts, and B 0 ≈ 65 G (plateau region) [A. Ganguli et al., "Investigation of absorption mechanisms in helicon discharges in conducting waveguides," Plasma Sources Sci. Technol. 20(1), 015021 (2011). Copyright © 2011 IOP Publishing Ltd.].

Image of FIG. 10.
FIG. 10.

Axial potential energy profiles for electrons (=U e) and ions (=U i) corresponding to the plasma potential profile in Fig. 9. Figure also shows the different regions and the particle populations. Region I (shown as a dotted curve) is the extrapolated region. The dashed lines on the edges of region II represent double layers in Helicon plasmas.

Tables

Generic image for table
Table I.

Summary of damping pattern of modes of plasma loaded waveguide (0 ≤ ν/ω ≤ 1.25) [Reprinted with permission from A. Ganguli et al., Phys. Plasmas 14, 113503 (2007). Copyright © 2007 American Institute of Physics].

Generic image for table
Table II.

Theoretically computed mode data using plasma parameters and RF data from Figs. 6 and 7. [A. Ganguli et al., "Investigation of absorption mechanisms in helicon discharges in conducting waveguides," Plasma Sources Sci. Technol. 20(1), 015021 (2011). Copyright © 2011 IOP Publishing Ltd.]

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2012-07-30
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Understanding helicon plasmas
http://aip.metastore.ingenta.com/content/aip/journal/pop/19/7/10.1063/1.4739779
10.1063/1.4739779
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