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Investigating the role of hydrogen in silicon deposition using an energy-resolved mass spectrometer and a Langmuir probe in an Ar/H2 radio frequency magnetron discharge
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10.1063/1.4740508
/content/aip/journal/pop/19/7/10.1063/1.4740508
http://aip.metastore.ingenta.com/content/aip/journal/pop/19/7/10.1063/1.4740508
/content/aip/journal/pop/19/7/10.1063/1.4740508
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/content/aip/journal/pop/19/7/10.1063/1.4740508
2012-07-31
2014-11-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Investigating the role of hydrogen in silicon deposition using an energy-resolved mass spectrometer and a Langmuir probe in an Ar/H2 radio frequency magnetron discharge
http://aip.metastore.ingenta.com/content/aip/journal/pop/19/7/10.1063/1.4740508
10.1063/1.4740508
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