Schematic diagram of the magnetron system used in this study.
Ion energy distributions of (a) Si + (b) Ar + , and (c) ArH + ions measured in an Ar-H2 discharge measured with 5 sccm of hydrogen in the discharge.
Plots showing (a) dependence on hydrogen flow rate (b) the correlation Ar + and ArH + ions have with Si + ions (c) correlation between ArH + and Ar + ions.
Dependence of silicon and silicon hydride species: (a) ionized and neutral species, (b) neutral species, and (c) ionized species on hydrogen flow rate.
Dependence of (a) flux (b) ion energy distribution (c) peak energies of H + ions on hydrogen flow rate.
Dependence of (a) electron and ion densities (b) the ratio of ion density to electron density (c) re-plot of the electron density for clarity, (e) electron energy on hydrogen flow rate in an Ar-H2 discharge.
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