1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Investigating the role of hydrogen in silicon deposition using an energy-resolved mass spectrometer and a Langmuir probe in an Ar/H2 radio frequency magnetron discharge
Rent:
Rent this article for
USD
10.1063/1.4740508
/content/aip/journal/pop/19/7/10.1063/1.4740508
http://aip.metastore.ingenta.com/content/aip/journal/pop/19/7/10.1063/1.4740508
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of the magnetron system used in this study.

Image of FIG. 2.
FIG. 2.

Ion energy distributions of (a) Si + (b) Ar + , and (c) ArH + ions measured in an Ar-H2 discharge measured with 5 sccm of hydrogen in the discharge.

Image of FIG. 3.
FIG. 3.

Plots showing (a) dependence on hydrogen flow rate (b) the correlation Ar + and ArH + ions have with Si + ions (c) correlation between ArH + and Ar + ions.

Image of FIG. 4.
FIG. 4.

Dependence of silicon and silicon hydride species: (a) ionized and neutral species, (b) neutral species, and (c) ionized species on hydrogen flow rate.

Image of FIG. 5.
FIG. 5.

Dependence of (a) flux (b) ion energy distribution (c) peak energies of H + ions on hydrogen flow rate.

Image of FIG. 6.
FIG. 6.

Dependence of (a) electron and ion densities (b) the ratio of ion density to electron density (c) re-plot of the electron density for clarity, (e) electron energy on hydrogen flow rate in an Ar-H2 discharge.

Loading

Article metrics loading...

/content/aip/journal/pop/19/7/10.1063/1.4740508
2012-07-31
2014-04-18
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Investigating the role of hydrogen in silicon deposition using an energy-resolved mass spectrometer and a Langmuir probe in an Ar/H2 radio frequency magnetron discharge
http://aip.metastore.ingenta.com/content/aip/journal/pop/19/7/10.1063/1.4740508
10.1063/1.4740508
SEARCH_EXPAND_ITEM