Current-voltage Characteristics of atmospheric rf discharges at an oxygen admixture of 0.6% for various driving frequencies.
Breakdown voltage as a function of frequency at the oxygen admixtures of 0.2% (a), 0.6% (b), and 1.0% (c).
Max time-averaged electron temperature as a function of frequency for various oxygen admixtures at 40 W/cm3.
Atomic oxygen density, excited oxygen density (a), ozone density and SDO density (b) as a function of frequency at the oxygen admixture of 0.6% under a constant power density of 40 W/cm3.
Max time-averaged atomic oxygen density at 40 W/cm3 for various frequencies (a) and max time-averaged atomic oxygen density and max time-averaged electron temperature under the given discharge conditions (b) as a function of oxygen admixture.
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