Time-averaged (a) electron density and (b) plasma potential for SF microplasmas and their equivalent DF microplasmas.
Electron energy probability function (EEPF) (a) in the center of the discharge and (b) at the electrode, for SF microplasmas and their equivalent DF microplasmas. (c) The spatial profiles of the electron temperature.
(a) Time-averaged EEDFs with driving frequency at the left-hand electrode. (b) The relative portion of energetic electrons striking the electrode for various frequencies.
(a) Time-averaged and (c)–(f) time-resolved spatial profiles of the power density dissipated by the electrons for various frequencies. (c) 100 MHz, (d) 900 MHz + 13.56 MHz (f eff = 100 MHz), (e) 400 MHz, and (f) 900 MHz + 13.56 MHz (f eff = 400 MHz). (b) The ratio of electron-dissipated power density for SF microplasmas and their equivalent DF microplasmas.
Spatio-temporal distribution of the sheath width at the ground electrode as a function of time within one LF (13.56 MHz) period for different effective frequencies: (a) 100 MHz and (b) 400 MHz.
Time evolution of the normalized electron density in He atmospheric microplasmas for frequencies of (a) and (b) 100 MHz, (c) and (d)900 MHz + 13.56 MHz (f eff = 100 MHz), (e)and (f) 400 MHz, and (g) and (h) 900 MHz +13.56 MHz (f eff = 400 MHz). (a), (c), (e), and (g) Normalized density of electrons with energy ε > 20 eV. (b), (d), (f), and (h) Normalized density of electrons with energy 4 eV < ε < 20 eV. The white lines indicate the movement of the sheath edges in SF microplasmas.
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