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Particle-in-cell simulation of an electronegative plasma under direct current bias studied in a large range of electronegativity
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10.1063/1.4798501
/content/aip/journal/pop/20/4/10.1063/1.4798501
http://aip.metastore.ingenta.com/content/aip/journal/pop/20/4/10.1063/1.4798501

Figures

Image of FIG. 1.
FIG. 1.

Illustration of the 1D PIC-MCC system where an electronegative plasma exists between two symmetrical flat parallel electrodes. S+, S, and Se are the positive ion, negative ion, and electron source term, respectively. Arrows show that the injection is uniform in the plasma bulk, i.e., where thenet charge is almost zero. n+, n, and ne are the positive ion, negative ion,and electron density and Vb the bias applied to the right electrode (Vb =−100 V).

Image of FIG. 2.
FIG. 2.

Plasma potential profile between the grounded and the biased electrode (−100 V) averaged over 10 μs for different electronegativity . The positive ion density is ∼1016 m−3, calculated for the conditions summarized in Table I . The inset is a zoom emphasizing the differences at the left sheath.

Image of FIG. 3.
FIG. 3.

(a) The potential drop within the left sheath as a function of the electronegativity . (b) Evolution of the negative ion flux collected by the electrodes and normalized by the positive ion flux as a function of the electronegativity . The positive ion density is ∼1016 m−3 and the results are calculated for the conditions summarized in Table I . The dashed lines are guides for the eye.

Image of FIG. 4.
FIG. 4.

Normalized velocity of positive ions at the right sheath edge and of negative ions and electrons at the left sheath edge as a function of the electronegativity. The particle velocities are normalized by . The dotted, dashed, dot-dashed and solid lines correspond, respectively, to Eqs. (9) , (11) , (18) , and (19) .

Tables

Generic image for table
Table I.

Conditions used in the simulation.

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/content/aip/journal/pop/20/4/10.1063/1.4798501
2013-04-02
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Particle-in-cell simulation of an electronegative plasma under direct current bias studied in a large range of electronegativity
http://aip.metastore.ingenta.com/content/aip/journal/pop/20/4/10.1063/1.4798501
10.1063/1.4798501
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