Illustration of the 1D PIC-MCC system where an electronegative plasma exists between two symmetrical flat parallel electrodes. S+, S−, and Se are the positive ion, negative ion, and electron source term, respectively. Arrows show that the injection is uniform in the plasma bulk, i.e., where thenet charge is almost zero. n+, n−, and ne are the positive ion, negative ion,and electron density and Vb the bias applied to the right electrode (Vb =−100 V).
Plasma potential profile between the grounded and the biased electrode (−100 V) averaged over 10 μs for different electronegativity . The positive ion density is ∼1016 m−3, calculated for the conditions summarized in Table I . The inset is a zoom emphasizing the differences at the left sheath.
(a) The potential drop within the left sheath as a function of the electronegativity . (b) Evolution of the negative ion flux collected by the electrodes and normalized by the positive ion flux as a function of the electronegativity . The positive ion density is ∼1016 m−3 and the results are calculated for the conditions summarized in Table I . The dashed lines are guides for the eye.
Normalized velocity of positive ions at the right sheath edge and of negative ions and electrons at the left sheath edge as a function of the electronegativity. The particle velocities are normalized by . The dotted, dashed, dot-dashed and solid lines correspond, respectively, to Eqs. (9) , (11) , (18) , and (19) .
Conditions used in the simulation.
Article metrics loading...
Full text loading...