Temporal evolutions of the conduction current density and pulsed voltage.
Temporal evolutions of various particle densities within 1000 ns.
Temporal evolutions of various particle densities. (a), (c), and (d) are within one period of 50 ms, and (b) is within 1.0 ms.
(a) Spatial profiles of the charged particle densities, and the sheath region is shown expanded in small figure. (b) Spatial profiles of the electric field and the electron temperature when the current reaches maximum value. The cathode is at 0 cm.
The dependence of iodine atom concentration and RMS current density on the mixture ratio (partial pressure of CF3I) at he pulsed voltage amplitude of 3 kV. The total pressure of mixture gas keeps 10 Torr.
The dependence of the dissociation degree of CF3I on the mixture ratio (partial pressure of CF3I).The total pressure of mixture gas keeps 10 Torr.
The dependences of iodine atom concentration on the partial pressure of CF3I under different voltage amplitudes. The total pressure of mixture gas keeps 10 Torr.
Conduction current density and iodine atom density under the pulsed width of the 450 ns and 550 ns. Solid line is under 450 ns and dashed line is under 550 ns.
Elementary processes considered in He-CF3I discharge.
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