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Improved fluid simulations of radio-frequency plasmas using energy dependent ion mobilities
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10.1063/1.4804280
/content/aip/journal/pop/20/5/10.1063/1.4804280
http://aip.metastore.ingenta.com/content/aip/journal/pop/20/5/10.1063/1.4804280

Figures

Image of FIG. 1.
FIG. 1.

One-dimensional model regime in (a) symmetric and (b) asymmetric configurations of the CCP.

Image of FIG. 2.
FIG. 2.

mobility scaling in high field region (red dashed line) in comparison to zero field mobility assumption (black dashed line) and experimental data from Ellis et al. (black square symbols) (values based on  = 40 Pa and  = 300 K).

Image of FIG. 3.
FIG. 3.

Distribution of mesh elements in linear modeling domain.

Image of FIG. 4.
FIG. 4.

Voltage-current density characteristic for both models and resulting power density.

Image of FIG. 5.
FIG. 5.

Time and space resolved ionization of O molecules through direct electron impact obtained from (a) non-modified and (b) modified symmetrical model on a common linear false color scale ( = 40 Pa, ). Dashed lines indicate the sheath position.

Image of FIG. 6.
FIG. 6.

Weighted time and space averaged ion energies ( = 40 Pa, ).

Image of FIG. 7.
FIG. 7.

Time averaged density profiles of O , electrons, and O in the discharge volume for a symmetric discharge geometry using the non-modified (solid lines) and modified (dashed lines) model ( = 40 Pa, ).

Image of FIG. 8.
FIG. 8.

Emitted secondary electron number density and total electron number densities in both models at the powered electrode over one rf period ( = 40 Pa, ).

Image of FIG. 9.
FIG. 9.

Time and space resolved ionization rate of O molecules through direct electron impact obtained from (a) non-modified model and (b) modified asymmetrical model on a common linear false color scale ( = 40 Pa, ). Dashed lines indicate the sheath position.

Image of FIG. 10.
FIG. 10.

Time averaged density profiles of O , electrons, and O along the discharge gap for an asymmetric geometry using the non-modified (solid lines) and modified (dashed lines) models ( = 40 Pa, ).

Image of FIG. 11.
FIG. 11.

Weighted time and space averaged ion energies obtained under same conditions as in Figure 5 with direct comparison of the effect of geometrical asymmetry as well as modification to the model ( = 40 Pa, ).

Tables

Generic image for table
Table I.

Zero field ( = 0) mobility and diffusion coefficient as used in the numerical simulation of the O discharge.

Generic image for table
Table II.

Elementary reactions and corresponding rate coefficients in the O discharge.

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/content/aip/journal/pop/20/5/10.1063/1.4804280
2013-05-08
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Improved fluid simulations of radio-frequency plasmas using energy dependent ion mobilities
http://aip.metastore.ingenta.com/content/aip/journal/pop/20/5/10.1063/1.4804280
10.1063/1.4804280
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