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Comment on Thickness Measurements of Sharp Thin Film Steps''
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Rev. Sci. Instrum. 38, 294 (1967)
/content/aip/journal/rsi/38/2/10.1063/1.1771392
1.
1.S. J. Lins, Trans. 8th Natl. Vacuum Symp., L. E. Preuss, Ed. (Pergamon Press, Inc., New York, 1961), Vol. 2, p. 846.
2.
2.G. C. Bailey, Rev. Sci. Instr. 37, 1260 (1966).
3.
3.J. M. Bennett, J. Opt. Soc. Am. 54, 612 (1964).
4.
4.There is an arithmetic error in one thickness value in Ref. 2. The number 9490 Å should read 9477 Å, as is shown in the last column of Table I.
5.
5.W. F. Koehler, J. Opt. Soc. Am. 48, 55 (1958).
6.
6.The correct interference equation is given in Eq. (10) of Ref. 3. Since the phase change on reflection for silver (which is used on most interferometer plates) is not too different from π, and in Eq. (10) can be set equal to π, and the term (which now equals λ) can be transferred to the left hand side of the equation, thus obtaining the approximate equation given here. Note that n in this equation equals in the notation of Ref. 3 [compare Eq. (1) in this note to Eq. (13) in Ref. 3].
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2004-12-29
2015-07-31

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