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Vacuum arc ion sources
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10.1063/1.1144756
/content/aip/journal/rsi/65/10/10.1063/1.1144756
http://aip.metastore.ingenta.com/content/aip/journal/rsi/65/10/10.1063/1.1144756
/content/aip/journal/rsi/65/10/10.1063/1.1144756
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/content/aip/journal/rsi/65/10/10.1063/1.1144756
1994-10-01
2014-07-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Vacuum arc ion sources
http://aip.metastore.ingenta.com/content/aip/journal/rsi/65/10/10.1063/1.1144756
10.1063/1.1144756
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