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A new apparatus for photon‐ and ion‐beam‐assisted deposition
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10.1063/1.1146050
/content/aip/journal/rsi/66/2/10.1063/1.1146050
http://aip.metastore.ingenta.com/content/aip/journal/rsi/66/2/10.1063/1.1146050
/content/aip/journal/rsi/66/2/10.1063/1.1146050
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/content/aip/journal/rsi/66/2/10.1063/1.1146050
1995-02-01
2014-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A new apparatus for photon‐ and ion‐beam‐assisted deposition
http://aip.metastore.ingenta.com/content/aip/journal/rsi/66/2/10.1063/1.1146050
10.1063/1.1146050
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