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Atmospheric pressure plasma chemical vapor deposition system for high-rate deposition of functional materials
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10.1063/1.1305510
/content/aip/journal/rsi/71/8/10.1063/1.1305510
http://aip.metastore.ingenta.com/content/aip/journal/rsi/71/8/10.1063/1.1305510
/content/aip/journal/rsi/71/8/10.1063/1.1305510
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/content/aip/journal/rsi/71/8/10.1063/1.1305510
2000-08-01
2014-08-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Atmospheric pressure plasma chemical vapor deposition system for high-rate deposition of functional materials
http://aip.metastore.ingenta.com/content/aip/journal/rsi/71/8/10.1063/1.1305510
10.1063/1.1305510
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