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An apparatus for the measurement of internal stress and thermal expansion coefficient of metal oxide films
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10.1063/1.1357228
/content/aip/journal/rsi/72/4/10.1063/1.1357228
http://aip.metastore.ingenta.com/content/aip/journal/rsi/72/4/10.1063/1.1357228
/content/aip/journal/rsi/72/4/10.1063/1.1357228
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/content/aip/journal/rsi/72/4/10.1063/1.1357228
2001-04-01
2014-08-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: An apparatus for the measurement of internal stress and thermal expansion coefficient of metal oxide films
http://aip.metastore.ingenta.com/content/aip/journal/rsi/72/4/10.1063/1.1357228
10.1063/1.1357228
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