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Fast driving technique for integrated thermal bimorph actuator toward high-throughput atomic-force microscopy
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10.1063/1.1488148
/content/aip/journal/rsi/73/7/10.1063/1.1488148
http://aip.metastore.ingenta.com/content/aip/journal/rsi/73/7/10.1063/1.1488148
/content/aip/journal/rsi/73/7/10.1063/1.1488148
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/content/aip/journal/rsi/73/7/10.1063/1.1488148
2002-06-21
2014-07-11
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fast driving technique for integrated thermal bimorph actuator toward high-throughput atomic-force microscopy
http://aip.metastore.ingenta.com/content/aip/journal/rsi/73/7/10.1063/1.1488148
10.1063/1.1488148
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