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In situ mechanical characterization of square microfabricated elastomeric membranes using an improved microindentation
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10.1063/1.1638894
/content/aip/journal/rsi/75/2/10.1063/1.1638894
http://aip.metastore.ingenta.com/content/aip/journal/rsi/75/2/10.1063/1.1638894
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/content/aip/journal/rsi/75/2/10.1063/1.1638894
2004-01-29
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: In situ mechanical characterization of square microfabricated elastomeric membranes using an improved microindentation
http://aip.metastore.ingenta.com/content/aip/journal/rsi/75/2/10.1063/1.1638894
10.1063/1.1638894
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