Cluster-eliminating filter: (a) photos and (b) schematic cross-sectional view.
Reactor A for evaluating the cluster-eliminating efficiency of the filter.
Reactor B equipped with cluster-eliminating filter for depositing cluster-free a-Si:H films.
Dependence of on volume fraction of clusters incorporated into a-Si:H films. Solid circles and gray rectangles are results of films deposited by cluster-suppressed plasma CVD without cluster-eliminating filter reported in Ref. 10. Solid square corresponds to conventional device quality films.
values and deposition rates for films deposited without and with the filter.
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