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Debris characteristics of a laser-produced tin plasma for extreme ultraviolet source
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10.1063/1.2136874
/content/aip/journal/rsi/76/12/10.1063/1.2136874
http://aip.metastore.ingenta.com/content/aip/journal/rsi/76/12/10.1063/1.2136874
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

The energy distribution of laser-produced tin ions. Solid curve shows the energy distribution of suprathermal ion current measured by a FC. The energy distribution of and measured by an ESA is also presented as circles and rectangles, respectively.

Image of FIG. 2.
FIG. 2.

SEM photographs of neutral fragments on silicon substrates, together with corresponding histogram of neutral fragment size at (a) and (b).

Image of FIG. 3.
FIG. 3.

The angular distribution of EUV emission energy, peak current of suprathermal ions, and total area of neutral fragments.

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/content/aip/journal/rsi/76/12/10.1063/1.2136874
2005-12-14
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Debris characteristics of a laser-produced tin plasma for extreme ultraviolet source
http://aip.metastore.ingenta.com/content/aip/journal/rsi/76/12/10.1063/1.2136874
10.1063/1.2136874
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