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Characterization system for resonant micro- and nanocantilevers
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View: Figures


Image of FIG. 1.
FIG. 1.

(Color online) Schematic diagram of the characterization system.

Image of FIG. 2.
FIG. 2.

inlet valve setup (from left to right): The flow of is limited by a pressure reducing valve, followed by a bellows valve (only on/off), immediately before the chamber body.

Image of FIG. 3.
FIG. 3.

(Color online) Manifold for injection of chemical vapor. A: latex membrane; B: outer valve; C: chemical manifold; D: vacuum proof Teflon valve.

Image of FIG. 4.
FIG. 4.

(Color online) Closeup of the sample holder PCB, showing the PGA socket, one of the thermometer probes, and the two illuminating LEDs.

Image of FIG. 5.
FIG. 5.

(Color online) PZT adapter, mounted with a ceramic piezoelectric transducer for actuation of passive cantilever chips.

Image of FIG. 6.
FIG. 6.

(Color online) Example of measured data and analytical fit of the vibrational amplitude around the third flexural mode of the cantilever in vacuum .

Image of FIG. 7.
FIG. 7.

(Color online) Schematic diagram of the laser-optical detection system.

Image of FIG. 8.
FIG. 8.

Measured and modeled factors for flexural mode 1 (circles), 3 (triangles), and 5 (squares) of the cantilever as a function of Ar pressure. The dissipative damping model is represented by the dotted curve; the dashed curve is the molecular damping; and the dash-dotted line is the upper limit of internal damping.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characterization system for resonant micro- and nanocantilevers