(Color online) Schematic diagram of the characterization system.
inlet valve setup (from left to right): The flow of is limited by a pressure reducing valve, followed by a bellows valve (only on/off), immediately before the chamber body.
(Color online) Manifold for injection of chemical vapor. A: latex membrane; B: outer valve; C: chemical manifold; D: vacuum proof Teflon valve.
(Color online) Closeup of the sample holder PCB, showing the PGA socket, one of the thermometer probes, and the two illuminating LEDs.
(Color online) PZT adapter, mounted with a ceramic piezoelectric transducer for actuation of passive cantilever chips.
(Color online) Example of measured data and analytical fit of the vibrational amplitude around the third flexural mode of the cantilever in vacuum .
(Color online) Schematic diagram of the laser-optical detection system.
Measured and modeled factors for flexural mode 1 (circles), 3 (triangles), and 5 (squares) of the cantilever as a function of Ar pressure. The dissipative damping model is represented by the dotted curve; the dashed curve is the molecular damping; and the dash-dotted line is the upper limit of internal damping.
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