banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Microscopic four-point probe based on SU-8 cantilevers
Rent this article for
View: Figures


Image of FIG. 1.
FIG. 1.

Schematic representation of the microscopic four-point probe ; upper right: four-point measurement principle; -to-probe spacing.

Image of FIG. 2.
FIG. 2.

Fabrication of the : (a) KOH etch of tip molds; (b) wet oxidation and poly-Si deposition, metal layer patterned by Cl dry etch; (c) -thick SU-8 layer for cantilevers; (d) -thick SU-8 layer for body chip; (e) release etch with .

Image of FIG. 3.
FIG. 3.

SEM micrographies of with probe-to-probe spacing . (a) Body chip with cantilever (all SU-8) and with four contact electrodes in metal; (b) SU-8 cantilever split up in four microcantilevers; (c) details of the pyramidal probe tips (SU-8 covered by metal layer) at the extremity of the cantilevers; tip height .

Image of FIG. 4.
FIG. 4.

4PP resistivity measurement on -thick Au film; currents of were applied and the four-point voltages were measured; the resulting mean sheet resistance is comparable to the value measured with the macroscopic resistivity meter Omnimap RS75 at a current of .

Image of FIG. 5.
FIG. 5.

Four-point measurement on -thick pentacene film; a current sweep up to with a step of was performed; the resulting mean value of sheet resistance is .


Article metrics loading...


Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Microscopic four-point probe based on SU-8 cantilevers