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Measurement of thermal conductivity of thin films with a Si- membrane-based microcalorimeter
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) with the 200 nm Pb film deposited. of this rather thick film is very large compared to , which is barely visible above the temperature axis. Insets are side-view schematics of the calorimeter before and after sample deposition. (b) in both superconducting (zero field) and normal (one tesla) states. Inset is a top view schematic of the calorimeter.

Image of FIG. 2.
FIG. 2.

(a) vs shown with after deposition of the thin Au film. Subtracting the radiation terms and gives , shown with solid lines. is shown by a dotted line. Inset: a low log-log plot shows the effects of surface scattering. is measured for the membrane grown on thermal oxide , while is measured for a membrane grown on LTO which is dominated by diffuse scattering. (b) vs from 10–300 K. The dashed line is the prediction of the Wiedemann-Franz law. is lower than at 300 K and shows roughly linear dependence for . Inset: obtained using and .

Image of FIG. 3.
FIG. 3.

Plot of the product of sample film thickness and sample thermal conductivity, , vs . Solid contour lines show required values for estimated relative error on to be 0.03, 0.05, 0.10, and 0.20. Dashed lines indicate conditions where estimate of error depends on details of the microcalorimeter or sample due to surface scattering (low , low ) or sample emissivity . Symbols indicate measured values for the Pb and Au films.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Measurement of thermal conductivity of thin films with a Si-N membrane-based microcalorimeter