1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Comparison of nanometer-thick films by x-ray reflectivity and spectroscopic ellipsometry
Rent:
Rent this article for
USD
10.1063/1.1848660
/content/aip/journal/rsi/76/2/10.1063/1.1848660
http://aip.metastore.ingenta.com/content/aip/journal/rsi/76/2/10.1063/1.1848660

Figures

Image of FIG. 1.
FIG. 1.

Experimental (●) and simulated (—) x-ray reflectivity curves for 10–100 nm films.

Image of FIG. 2.
FIG. 2.

Variation of the spectroscopic ellipsometry parameter “” on the incident wavelength for films, measured at an angle on incidence of 75°. Experimental points are represented by (X) while solid lines show the simulated results.

Image of FIG. 3.
FIG. 3.

The wavelength dependence of the refractive index for 10–100 nm films. The solid lines represent the average value of the refractive index while the symbols represent the individual data points.

Image of FIG. 4.
FIG. 4.

Comparisons of film thickness using spectroscopic ellipsometry and x-ray reflectivity. Symbols represent the individual results and solid line shows the fitted results by a linear least-squares analysis. The linear equations fitting the data points are also shown for the interface layer (a) included and (b) excluded.

Tables

Generic image for table
Table I.

Deposition conditions for films.

Generic image for table
Table II.

Average thickness and density values obtained from XRR for layered structures, with “linearly graded interface” layer. The values are reported with (esd), the standard deviations from the average values for-six measurements performed over each sample.

Generic image for table
Table III.

Average thickness obtained from SE for layered structures. The values are reported with (esd), the standard deviations from the average values for six measurements performed over each sample. The refractive index values at are also shown.

Loading

Article metrics loading...

/content/aip/journal/rsi/76/2/10.1063/1.1848660
2005-01-10
2014-04-18
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Comparison of nanometer-thick films by x-ray reflectivity and spectroscopic ellipsometry
http://aip.metastore.ingenta.com/content/aip/journal/rsi/76/2/10.1063/1.1848660
10.1063/1.1848660
SEARCH_EXPAND_ITEM