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Piezoresistive microcantilevers for in situ stress measurements during thin film deposition
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10.1063/1.1947067
/content/aip/journal/rsi/76/7/10.1063/1.1947067
http://aip.metastore.ingenta.com/content/aip/journal/rsi/76/7/10.1063/1.1947067
/content/aip/journal/rsi/76/7/10.1063/1.1947067
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/content/aip/journal/rsi/76/7/10.1063/1.1947067
2005-06-23
2014-11-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Piezoresistive microcantilevers for in situ stress measurements during thin film deposition
http://aip.metastore.ingenta.com/content/aip/journal/rsi/76/7/10.1063/1.1947067
10.1063/1.1947067
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