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Microscopic four-point atomic force microscope probe technique for local electrical conductivity measurement
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10.1063/1.1988130
/content/aip/journal/rsi/76/8/10.1063/1.1988130
http://aip.metastore.ingenta.com/content/aip/journal/rsi/76/8/10.1063/1.1988130

Figures

Image of FIG. 1.
FIG. 1.

(a) Scanning electron micrograph (SEM) of the four-electrode probe, which was fabricated from a V-shaped tip of a conventional AFM probe. The inset shows the original tip geometry before FIB fabrication. The directions of the tips shown in the two images are opposite. (b) The micro-4P AFM probe cantilever. (c) The well-defined circuitry on the probe surface.

Image of FIG. 2.
FIG. 2.

(Color online). (a) AFM surface image obtained by the micro-4P AFM probe scanning. (b) Typical surface topography of the same sample obtained by standard AFM contact mode probe.

Image of FIG. 3.
FIG. 3.

(Color online). Current-voltage data of aluminum and ITO thin film samples obtained by the micro-4P AFM probe with a scanning rate of , working environment temperature at , and relative humidity 46.2%. Area scanned is . Data are fitted to linear functions as shown.

Tables

Generic image for table
Table I.

Conductivity of the samples obtained by using the 4P AFM probe technique.

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/content/aip/journal/rsi/76/8/10.1063/1.1988130
2005-07-20
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Microscopic four-point atomic force microscope probe technique for local electrical conductivity measurement
http://aip.metastore.ingenta.com/content/aip/journal/rsi/76/8/10.1063/1.1988130
10.1063/1.1988130
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