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Design and performance of a piezoelectric actuated precise rotary positioner
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View: Figures


Image of FIG. 1.
FIG. 1.

A Scott-Russell linkage.

Image of FIG. 2.
FIG. 2.

Design of the actuator stage: (1) multilayer PZT, (2) the Scott-Russell linkage, (3) leaf spring (four locations), (4) flexure hinge (four locations), (5) rotor, (6) EDM clearance, and (7) rotation center. Arrows indicate rotation of rotor.

Image of FIG. 3.
FIG. 3.

A photo of the actuator stage sitting on optical table.

Image of FIG. 4.
FIG. 4.

Cross section of the stage assembly: (1) stationary case, (2) actuator stage (shown in Fig. 2), (3) ball bearing, (4) rotor and output shaft, (5) slip-and-stick loading disk, (6) thrust bearing, (7) spring for preload, (8) cover, and (9) torque output rod.

Image of FIG. 5.
FIG. 5.

A lumped mass model of stick-slip drive positioning stage to solve the mass distribution.

Image of FIG. 6.
FIG. 6.

Displacement vector plot of finite element modeling (FEM) simulation results.

Image of FIG. 7.
FIG. 7.

A photograph of experiment setup.

Image of FIG. 8.
FIG. 8.

Measured impedance of piezoelectric actuator.

Image of FIG. 9.
FIG. 9.

Displacement of actuator stage operating at .

Image of FIG. 10.
FIG. 10.

Input impulse wave form (the lower curve) and the output displacement (the upper curve).

Image of FIG. 11.
FIG. 11.

Measured long travel stepping motion of rotary stage.

Image of FIG. 12.
FIG. 12.

Measured rotation of output shaft vs number of preload screws.


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Scitation: Design and performance of a piezoelectric actuated precise rotary positioner