A Scott-Russell linkage.
Design of the actuator stage: (1) multilayer PZT, (2) the Scott-Russell linkage, (3) leaf spring (four locations), (4) flexure hinge (four locations), (5) rotor, (6) EDM clearance, and (7) rotation center. Arrows indicate rotation of rotor.
A photo of the actuator stage sitting on optical table.
Cross section of the stage assembly: (1) stationary case, (2) actuator stage (shown in Fig. 2), (3) ball bearing, (4) rotor and output shaft, (5) slip-and-stick loading disk, (6) thrust bearing, (7) spring for preload, (8) cover, and (9) torque output rod.
A lumped mass model of stick-slip drive positioning stage to solve the mass distribution.
Displacement vector plot of finite element modeling (FEM) simulation results.
A photograph of experiment setup.
Measured impedance of piezoelectric actuator.
Displacement of actuator stage operating at .
Input impulse wave form (the lower curve) and the output displacement (the upper curve).
Measured long travel stepping motion of rotary stage.
Measured rotation of output shaft vs number of preload screws.
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