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Development of scanning x-ray fluorescence microscope with spatial resolution of using Kirkpatrick-Baez mirror optics
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10.1063/1.2358699
/content/aip/journal/rsi/77/10/10.1063/1.2358699
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/10/10.1063/1.2358699

Figures

Image of FIG. 1.
FIG. 1.

Optical system designed for hard x-ray nanofocusing.

Image of FIG. 2.
FIG. 2.

Relationship between slit size and FWHMs predicated by wave-optical calculation.

Image of FIG. 3.
FIG. 3.

Schematic drawing of scanning x-ray fluorescence microscope system.

Image of FIG. 4.
FIG. 4.

Focused beam profiles obtained with KB mirrors. Subscripts at the top right show virtual source size.

Image of FIG. 5.
FIG. 5.

Test pattern fabricated using FIB system.

Image of FIG. 6.
FIG. 6.

Observation results of test chart using SXFM. Scan parameters are shown in Table III. Graphs of (5) and (6) show line profiles along the dash line in the W and Ga distribution maps.

Image of FIG. 7.
FIG. 7.

Beam profiles before and after long scanning shown in Figs. 6(5) and 6(6). The time difference between the profiles is .

Image of FIG. 8.
FIG. 8.

Thermal stability of mirror manipulator and sample holder.

Image of FIG. 9.
FIG. 9.

Relationship between FWHM broadening and incident angle errors of the mirror. The vertical axis indicates the ratio to the best FWHM.

Tables

Generic image for table
Table I.

Parameters of elliptical mirrors.

Generic image for table
Table II.

Relationship between estimated beam size and measured photon fluxes.

Generic image for table
Table III.

Scan parameters of SXFM. Exposure time: for each scan.

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/content/aip/journal/rsi/77/10/10.1063/1.2358699
2006-10-11
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Development of scanning x-ray fluorescence microscope with spatial resolution of 30nm using Kirkpatrick-Baez mirror optics
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/10/10.1063/1.2358699
10.1063/1.2358699
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