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Quantitative measurements of indentation moduli by atomic force acoustic microscopy using a dual reference method
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10.1063/1.2360971
/content/aip/journal/rsi/77/10/10.1063/1.2360971
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/10/10.1063/1.2360971

Figures

Image of FIG. 1.
FIG. 1.

(Color online) The first contact resonance frequencies measured over areas of the Au, , and samples. In the bottom plot are shown the histograms made with the measured values shown in the top panel.

Image of FIG. 2.
FIG. 2.

(Color online) The second contact resonance frequencies measured over the same areas shown in Fig. 1. In the bottom plot are shown the histograms made with the measured values shown in the top panel.

Image of FIG. 3.
FIG. 3.

SEM image of the AFM probe after AFAM measurements.

Image of FIG. 4.
FIG. 4.

The inaccuracy in the indentation modulus of the tested material induced in the AFAM single reference method by the uncertainty in the tip’s indentation modulus . The tested material is (a) Au(111) and (b) Si(100). The contour labels are in GPa.

Image of FIG. 5.
FIG. 5.

[(a) and (b)] The theoretical uncertainty in measuring the indentation modulus of Si(100) with the dual reference method (see text for details). Choosing two references that bracket Si results in an uncertainty of or less (gray areas). (c) Cross sections of (a) (continuous line) and (b) (dashed line) for .

Tables

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Table I.

First and second measured contact resonances.

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Table II.

Indentation modulus (in GPa) of the materials measured. Theoretical values are included in parentheses. For every other row, each experimental value is determined by considering the two checked materials as references.

Generic image for table
Table III.

Calculated indentation modulus for the Si tip.

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/content/aip/journal/rsi/77/10/10.1063/1.2360971
2006-10-17
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Quantitative measurements of indentation moduli by atomic force acoustic microscopy using a dual reference method
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/10/10.1063/1.2360971
10.1063/1.2360971
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