Experimental arrangement of the compact x-ray microscope with a normal-incidence multilayer condenser mirror.
Calculated reflectivity for multilayers with a multilayer period of and a ratio of Cr thickness to total bilayer thickness , optimized for an incident angle of 1.5°. (a) Reflectivity of the multilayers depending on the number of bilayers. (b) Reflectivity for a stack of 300 bilayers depending on the roughness.
Comparison between the calculated lateral thickness distribution using a mask during the deposition process and the best experimentally achieved one (measured by the Bruker diffractometer). To illustrate the effect of the mask the thickness distribution without the mask is shown.
Emission spectrum of the methanol-jet laser-plasma source in the water window and the reflectivity of the multilayer mirror 2, matching the emission line (source data from Ref. 19).
Soft x-ray measurements of mirror 2. (a) Soft x-ray reflectivity for different measurement points on the mirror, measured by the PTB reflectometer at BESSY II. The position of the emission line at is marked (dashed line). (b) Reflected x-ray radiation detected on the CCD camera. The shadows in the image are due to the nozzle and the central stop.
Image of a Siemens star, taken by the compact x-ray microscope with magnification and a pixel element size of . The exposure time is .
Results of the hard and soft x-ray measurements for three multilayer mirrors. Hard x-ray measurements [small angle x-ray reflection (SAXR) measurements] were performed using a Bruker D5005 diffractometer operated with radiation . Soft x-ray measurements were done at the PTB reflectometer at BESSY II.
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