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Demonstration of low-temperature atomic force microscope with atomic resolution using piezoresistive cantilevers
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10.1063/1.2169469
/content/aip/journal/rsi/77/2/10.1063/1.2169469
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/2/10.1063/1.2169469
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

A diagram of PR-AFM: is the wheatstone bridge bias. VR is a variable resistor for balancing the bridge circuit. The cantilever deflection is proportional to the resistance change of the piezoresistor on a cantilever.

Image of FIG. 2.
FIG. 2.

Illustration of a typical commercial cantilever plate. Labels A, B, and GND correspond to the labels in Fig. 1.

Image of FIG. 3.
FIG. 3.

Schematics of the instruments: (1) end disk of insertion, (2) electrical hookup, (3) wires (silver-cored, Teflon-coated wires; for signal from the cantilever, coaxial-shielded wire used), (4) ceiling disk, (5) supporting column, (6) damping springs, (7) cantilever holder mount, (8) body of inertial coarse actuator, (9) moving shaft covered with sapphire plates (moves vertical, in illustration), (10) stacked piezolegs (four of six illustrated), (11) tube piezoscanner (enlarged part), (12) spring electrodes, (13) cantilever holder, (14) piezoresonator, (15) cantilever plate, (16) piezoresistive cantilever, (17) sample, and (18) sample holder (pressing plate also illustrated).

Image of FIG. 4.
FIG. 4.

The AFM topographic images in contact mode at (a) room temperature and (b) liquid-He temperature, . The sample is a specially patterned silicon wafer for use in multiprobe positioning. (a) At room temperature, constant force of , ; (b) at liquid-He temperature, , constant force of , .

Image of FIG. 5.
FIG. 5.

AFM topographic image of clean surface at liquid-He temperature, : resonance frequency of , amplitude of , , and scan size of .

Image of FIG. 6.
FIG. 6.

AFM topographic image of Si(100) clean surface with and surface superstructures at liquid-He temperature, : resonance frequency of , amplitude of , , and scan size of .

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/content/aip/journal/rsi/77/2/10.1063/1.2169469
2006-02-14
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Demonstration of low-temperature atomic force microscope with atomic resolution using piezoresistive cantilevers
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/2/10.1063/1.2169469
10.1063/1.2169469
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