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Production of multiply charged ion beams from solid substances with the mVINIS ion source
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10.1063/1.2151867
/content/aip/journal/rsi/77/3/10.1063/1.2151867
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/3/10.1063/1.2151867
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Figures

Image of FIG. 1.
FIG. 1.

Typical zinc ion-beam spectrum obtained by minioven technique. Natural zinc isotopic abundance of , , and broadens the width of recorded ion-beam peaks. The ion beams were extracted up to currents of , was the applied extraction potential, and was the run microwave heating power at .

Image of FIG. 2.
FIG. 2.

(Color online) The modified main gas inlet system for MIVOC method at mVINIS ion source. The small volume stainless-steel vessel with the ferrocene compound (A) is directly connected to the isolation valve USV (B) before the gas dosing valve UDV140, Balzers (C).

Image of FIG. 3.
FIG. 3.

Characteristic boron charge state spectrum obtained by MIVOC technique. The mVINIS ion source was tuned for the ion-beam current over with a kinetic energy of . Natural boron isotopic abundance is and .

Image of FIG. 4.
FIG. 4.

Characteristic iron charge state spectrum obtained by MIVOC technique. The ECR ion source was optimized for the ion-beam current up to with a kinetic energy of . In natural iron isotopic abundance is dominant of the isotope .

Image of FIG. 5.
FIG. 5.

(Color online) AFM three-dimensional image of implanted thin films by ion with an irradiation dose of and beam energy of . The scan size was .

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/content/aip/journal/rsi/77/3/10.1063/1.2151867
2006-03-09
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Production of multiply charged ion beams from solid substances with the mVINIS ion source
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/3/10.1063/1.2151867
10.1063/1.2151867
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