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Negative-ion yield in low-pressure radio frequency discharges in hydrogen: Particle modeling and vibrational kinetics
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10.1063/1.2151891
/content/aip/journal/rsi/77/3/10.1063/1.2151891
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/3/10.1063/1.2151891
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Charged particle number density (a) and average kinetic energy (b) as a function of position for a rf voltage of 300 V and a discharge pressure of 5 mtorr (, , , and ).

Image of FIG. 2.
FIG. 2.

(a) and electron (b) number density as a function of the position for different values of the discharge pressure (, , , , and ).

Image of FIG. 3.
FIG. 3.

Space-averaged number density of ions and electrons as a function of the gas pressure (, , , , and ).

Image of FIG. 4.
FIG. 4.

Vibrational distribution function for different values of the discharge pressure (, , , , and ).

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/content/aip/journal/rsi/77/3/10.1063/1.2151891
2006-03-09
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Negative-ion yield in low-pressure radio frequency discharges in hydrogen: Particle modeling and vibrational kinetics
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/3/10.1063/1.2151891
10.1063/1.2151891
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