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High-current vacuum-arc ion and plasma source “Raduga-5” application to intermetallic phase formation
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10.1063/1.2170037
/content/aip/journal/rsi/77/3/10.1063/1.2170037
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/3/10.1063/1.2170037

Figures

Image of FIG. 1.
FIG. 1.

Element concentration profiles over depth in ion-doped targets: (a) Ni (mode 2), (b) Ti (mode 4), (c) Ni (mode 1), and (d) Fe.

Image of FIG. 2.
FIG. 2.

Change in the irradiation dose and integral dose of introduced atoms depending on (a) ion implantation time ( system) and (b) distance to the ion source output ( system).

Image of FIG. 3.
FIG. 3.

View of the Ti target surface implanted with Al ions.

Image of FIG. 4.
FIG. 4.

Change in nanohardness over depth of initial targets (Ti and Ni) and ion-doped layers of and systems (a) and loading and unloading curves for the system and Ti target (b).

Image of FIG. 5.
FIG. 5.

Dependences of change in wear intensity and friction coefficient for ion-modified layers and initial Ti and Ni targets vs their temperature.

Tables

Generic image for table
Table I.

Raduga-5 ion source main parameters.

Generic image for table
Table II.

Ion implantation modes and results of intermetallic phase formation.

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/content/aip/journal/rsi/77/3/10.1063/1.2170037
2006-03-31
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High-current vacuum-arc ion and plasma source “Raduga-5” application to intermetallic phase formation
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/3/10.1063/1.2170037
10.1063/1.2170037
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