Element concentration profiles over depth in ion-doped targets: (a) Ni (mode 2), (b) Ti (mode 4), (c) Ni (mode 1), and (d) Fe.
Change in the irradiation dose and integral dose of introduced atoms depending on (a) ion implantation time ( system) and (b) distance to the ion source output ( system).
View of the Ti target surface implanted with Al ions.
Change in nanohardness over depth of initial targets (Ti and Ni) and ion-doped layers of and systems (a) and loading and unloading curves for the system and Ti target (b).
Dependences of change in wear intensity and friction coefficient for ion-modified layers and initial Ti and Ni targets vs their temperature.
Raduga-5 ion source main parameters.
Ion implantation modes and results of intermetallic phase formation.
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