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Development of ion sources for materials processing in china
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10.1063/1.2170097
/content/aip/journal/rsi/77/3/10.1063/1.2170097
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/3/10.1063/1.2170097
/content/aip/journal/rsi/77/3/10.1063/1.2170097
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/content/aip/journal/rsi/77/3/10.1063/1.2170097
2006-03-22
2015-05-04
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Development of ion sources for materials processing in china
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/3/10.1063/1.2170097
10.1063/1.2170097
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