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Fabrication of a Boersch phase plate for phase contrast imaging in a transmission electron microscope
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10.1063/1.2179411
/content/aip/journal/rsi/77/3/10.1063/1.2179411
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/3/10.1063/1.2179411
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic of a chip containing a Boersch phase plate, Au leads, and a macroscopic Au contact pad. (b) Zoom into the phase plate region on the freestanding membrane (in black). (c) Three-dimensional sketch of the central region of the phase plate.

Image of FIG. 2.
FIG. 2.

SEM images illustrating the different steps of the fabrication process of the Boersch phase plate. (a) After electron-beam lithography, Au evaporation, and lift-off. (b) After the first FIB lithography step. [(c) and (d)] Finished phase plate. (d) Close-up view of the ring electrode hole.

Image of FIG. 3.
FIG. 3.

Power spectra obtained from images of an amorphous W film observed in the TEM at a primary magnification of for two different voltages, (lower half) and (upper half). For the Thon rings are uniformly shifted, indicating a uniform phase shift of between scattered and unscattered electrons.

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/content/aip/journal/rsi/77/3/10.1063/1.2179411
2006-03-10
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of a Boersch phase plate for phase contrast imaging in a transmission electron microscope
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/3/10.1063/1.2179411
10.1063/1.2179411
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