Picture of a sample. The Au line is wide, with contact pads at each end. There are wire bonds connecting the pads to Au posts on a plastic support. The insert is a profilometer scan, perpendicular to the Au line. The depth of the trench was chosen to be for this sample.
Example of an AFM scan of the Au surface. The line scans on the picture, which are indicated by white lines, were chosen to run over the spots of maximum height. The insert lists the values of the difference between the maximum and minimum heights for each line scan.
(a) A schematic representation of two samples coming together, forming the air gap capacitors at each crossing point. (b) A photograph of an assembled device. Two samples on plastic supports are brought together and pushed by metallic screws.
Capacitance of the air gap capacitor as a function of electrode separation . The experimental data were taken by controlling the position of one of the electrodes with an translator. The presence of the translator shifts the value of the capacitance and so an experimental uncertainty of is introduced. For spacings of the experimental data agree with the simulation values, within the experimental uncertainties. We thus conclude that the simulation is an accurate description of the real capacitance down to .
Current through the resistor in series with the capacitor, as a function of the applied voltage from the dc voltage source. The value of the electrode separation is . For this value of separation, the value of the breakdown voltage is taken to be . The linear part of the curve is due to a leakage of approximately .
Data for breakdown voltage of air as a function of electrode separation. The error bars represent the statistical uncertainty due to geometrical factors (see text). The solid line is Paschen’s curve. For spacings below the data do not approach Paschen’s curve.
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