(Color online) (a) Schematic of the scanner, probe, and sample (not to scale). (b) An on-scale closeup of the slider. (c) Cross section view of the piezoceramic tube shows the numbering convention of outer electrodes (not to scale). (d) The piecewise parabolic wave form to produce an inertial step.
(Color online) Bode plots of the close-loop piezoceramic tube. The solid lines are the responses of normalized measured by swept-sine experiment (, limited by the dynamic signal analyzer). The dashed lines are computed from a four-pole, two-zero model . The analytical prediction of the first two resonant frequencies using Eq. (2) is indicated by the arrows.
Block diagram for the control of piezoceramic tube.
(Color online) Bode plots of the closed-loop system. Same as in Fig. 2, the frequency response is normalized by . The dashed lines represent the results of simulation. The solid lines are the swept-sine responses .
The simulation block diagram with the reset integrator friction model.
(Color online) The left column shows the results of uncontrolled system; the right column shows those of controlled system. [(a) and (b)] The simulated velocities of piezoceramic tube and slider. [(c) and (d)] The simulated displacements of piezoceramic tube and slider. [(e) and (f)] The simulated displacements of piezoceramic tube and slider with ten successive steps.
(Color online) The simulated and experimental (dashed) displacements of the controlled slider.
(Color online) The simulated and experimental (dashed) displacements of the uncontrolled piezoceramic tube.
(Color online) Average step size vs for motion in both the forward and backward directions (a) without control and (b) with control.
Dimensions and properties of the piezoceramic tube. The is the piezoelectric coefficient.
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