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Rotating cryogenic drum supplying solid Xe target to generate extreme ultraviolet radiation
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10.1063/1.2213216
/content/aip/journal/rsi/77/6/10.1063/1.2213216
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/6/10.1063/1.2213216

Figures

Image of FIG. 1.
FIG. 1.

Illustration of the rotating cryogenic drum: (a) a top view and (b) a side view.

Image of FIG. 2.
FIG. 2.

Measured diameter and depth of crater as a function of the irradiating laser energy.

Image of FIG. 3.
FIG. 3.

Xe ice thickness vs flow time of Xe gas. The rotation speeds of the drum were (circle), (square), and (triangle). The flow rate was .

Image of FIG. 4.
FIG. 4.

Growth rate of the Xe layer vs flow rate of Xe gas. Filled circle data points were obtained at a rotation speed of . Open circle and square data point were obtained at 600 and , respectively.

Image of FIG. 5.
FIG. 5.

Growth rate of the Xe layer vs rotation speed of the drum. The flow rate was .

Image of FIG. 6.
FIG. 6.

Illustration of the wipers. Three types of wipers having different cross sections (A, B, and C) were tested.

Image of FIG. 7.
FIG. 7.

Improved recovery speed of the Xe layer by the wipers vs rotation speed of the drum. Test results with the type A, B, and C wipers are plotted as filled circle, square, and triangle, respectively. The flow rate was .

Tables

Generic image for table
Table I.

Thermal and physical properties of Xe and .

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/content/aip/journal/rsi/77/6/10.1063/1.2213216
2006-06-27
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Rotating cryogenic drum supplying solid Xe target to generate extreme ultraviolet radiation
http://aip.metastore.ingenta.com/content/aip/journal/rsi/77/6/10.1063/1.2213216
10.1063/1.2213216
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